CASSETTE, SEMICONDUCTOR MANUFACTURING APPARATUS, CASSETTE TRANSPORTING APPARATUS AND SEMICONDUCTOR MANUFACTURING SYSTEM

摘要

PROBLEM TO BE SOLVED: To devise saving of the process, work period reduction and input error avoidance by workers in the treatment by a semiconductor manufacturing apparatus or transport of cassette conveyers. ;SOLUTION: Semiconductor manufacturing apparatus 7, 11 and cassette conveyer 15 have functions capable of recognizing cassette information for cassettes 8, 12 storing the cassette information (data of the housing wafer size, max. no. of wafers to be housed, existence of a cassette front cover, first slot height, slot pitch, cassette material, cassette handling position etc.), concerning the cassette. Based on the cassette information the semiconductor manufacturing apparatus 7, 11 execute the mounting/removal of the cassette cover, reloading of semiconductor wafers, and treatment of the max. no. of wafers to be housed and the cassette conveyer 15 controls the cassette grip operation and transport operation and changes the transport path.;COPYRIGHT: (C)1999,JPO