COATING FLUID FOR FORMING SILICEOUS COATING FILM AND SILICEOUS COATING FILM OBTAINED THEREFROM

摘要

PROBLEM TO BE SOLVED: To obtain a coating fluid having good film formability and giving a siliceous coating film having low permittivity by using a siloxane oligomer comprising specified repeating units. ;SOLUTION: This fluid contains a siloxane oligomer comprising repeating units represented by the formula (wherein R is a 1-4C alkyl, (substituted)phenyl, or (substituted)perfluorophenyl). This oligomer can be obtained by the hydrolytic polycondensation of a monoorganodichlorosilane or a monoorganodialkoxysilane. To form an oxide coating film by using the fluid, the fluid is applied to a substrate such as glass, ceramics, a silicon wafer, or a silicon wafer on which a circuit is formed by e.g. immersion or spin coating, the wet film is dried at 50-200°C, desirably, 100-150°C, and the dried film is backed at 300-500°C.;COPYRIGHT: (C)1999,JPO