PRODUCTION OF FUNCTIONAL WATER FOR CLEANING AND PRODUCING DEVICE FOR FUNCTIONAL WATER USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a producing method of functional water for cleaning capable of pouring always a constant trace quantity of alkali into a pure water or a reducing water by a remarkably simple and low cost means without being affected by the pressure or flow rate fluctuation of a main line and a producing device using the same. ;SOLUTION: An alkali reducing functional water useful for cleaning a substrate in an electronic part production is obtained by supplying the pure water supplied from a water purifying apparatus 1 successively to a gaseous hydrogen dissolving vessel 2 and an ion exchange resin cartridge for adjusting pH, which is prepared by mixing a strong acidic cation exchange resin containing an ammonium ion type with a strong acidic anion exchange resin of a hydroxyl ion type.;COPYRIGHT: (C)1999,JPO