SEMICONDUCTOR WAFER CASSETTE CONVEYER, STOCKER USED IN SEMICONDUCTOR WAFER CASSETTE CONVEYER, AND STOCKER IN/OUT STOCK WORK CONTROL METHOD/DEVICE USED IN SEMICONDUCTOR WAFER CASSETTE CONVEYER

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor wafer cassette conveyer of high conveying ability of a semiconductor wafer cassette, stocker used in the semiconductor wafer cassette conveyer, stocker in/out stock control method used in the semiconductor wafer cassette conveyer, automatic conveying vehicle control method, and a stocker in-stock collation method. ;SOLUTION: In a host computer 50, whether a storage place storing a semiconductor wafer cassette is provided or not in a stocker 36 in a storage destination is inquired. In the case of providing the storage place in the stocker 36, to an inter-stocker conveyer 42 or automatic conveying vehicle 38, a conveying work command is transmitted. Or to the stocker 36, an in-stock work command is transmitted.;COPYRIGHT: (C)1999,JPO