Cavity resonator null for ferromagnetic resonance measurement

摘要

PURPOSE: To provide a ferromagnetic resonance measuring cavity resonator which measures ferromagnetic resonance half value width of each part of a ferromagnetic monacrystal film wafer of large area, without significant modification, by using a commercial electron spin resonance measurement device. ;CONSTITUTION: A ferromagnetic resonance measuring cavity resonator 10 includes a cavity resonator 12 wherein a cavity part 16 is formed inside with a side wall 14. On the side wall 14, an input/output hole 18 and a through hole 20 are formed. A ferromagnetic plate 22 having a through hole 24 of the same size as the through hole 20 is installed on the outer surface of side wall 14. At this time, two through 20 and 24 are aligned. A wafer sample 26 is so pressed against the ferromagnetic plate 22 as to face the through hole 24.;COPYRIGHT: (C)1997,JPO