MOUNTING STRUCTURE OF CHEMICAL FILTER IN CLEAN ROOM

摘要

PROBLEM TO BE SOLVED: To improve replacement workability of a chemical filter by sufficiently securing a scaffold in replacement work. ;SOLUTION: The mounting structure is constituted so as to provide an inspection hole 18 freely opened and closed with a cap 22 on the ceiling rear side surface of a unit casing 3 arranged at a ceiling part in a clean room, having an UPLA filter 4 arranged on the underside and provided with a fan 5 inside and to house the chemical filter 24 formed into a mat like state so as to freely load and unload through the inspection hole 18 to install on the ULPA filter 4.;COPYRIGHT: (C)1999,JPO