AREA JUDGEMENT METHOD FOR ELECTRONIC IMAGE, AREA JUDGEMENT SYSTEM FOR ELECTRONIC IMAGE, SEM DEVICE PROVIDED WITH AREA JUDGEMENT SYSTEM OF ELECTRONIC IMAGE, AND COMPUTER READABLE RECORDING MEDIUM STORING AREA JUDGEMENT PROGRAM OF ELECTRONIC IMAGE

摘要

PROBLEM TO BE SOLVED: To make easily judgeable, the material names of respective areas in SEM (scanning type electronic microscope) images in the shape evaluation of a semiconductor element using the SEM images. ;SOLUTION: The contour line data of images are extracted from SEM image data in a contour line extraction part 130 and a shape pattern to be a reference pattern at the time of pattern matching is prepared by simulation calculation in a shape simulation part 140. In a pattern matching part 150, the pattern matching of the contour line data and the reference pattern is performed and attribute information relating to the contour line data is prepared. The attribute information is displayed as the material name of a material area on a display device not shown in the figure.;COPYRIGHT: (C)1998,JPO