OPTICAL WAVEGUIDE AND PRODUCTION OF OPTICAL WAVEGUIDE TYPE DIFFRACTION GRATING

摘要

PROBLEM TO BE SOLVED: To easily produce an optical waveguide type diffraction grating by reducing the optical waveguide type diffraction grating on an optical waveguide by irradiating the optical waveguide with the projected light of a mask pattern or transmitted light through a moving slit. ;SOLUTION: The optical waveguide type diffraction grating is produced on the optical waveguide by irradiating the optical waveguide with the projected light of the mask pattern of the transmitted light through the moving slit. For example, a slit image with UV light 83 is formed on a light beam path 50 by using the slit 81 and a lens 82, and a reflection part constituted of a stripe by a refractive index, than is. the optical waveguide type diffraction grating is formed by controlling the intensity of the UV light 83 and the movement of the slit image. In such a case, the reflection part is formed by moving the slit image in the longitudinal direction (direction shown by an arrow 84) of the path 50 with adjusting its speed while appropriately changing the intensity of the UV light 83.;COPYRIGHT: (C)1998,JPO