For Al alloy thin film formation for the reflected film of the optical type record media which is superior in composition uniformity make Al alloy sputtering target

摘要

PURPOSE:To produce a thin Al alloy film which is used for reflecting film, etc., for optical recording medium and has high reflectivity, superior corrosion resistance, and low thermal conductivity and also has excellent uniformity of composition and superior productivity. CONSTITUTION:The film is a thin film of an Al alloy which has a composition containing, as alloy component, 0.1-15atomic% Mn or further 0.1-10atomic% of Hf and/or Ta. This thin Al alloy film is produced by forming the thin Al alloy film on a substrate by means of sputtering by using a refined Al alloy target which has a composition containing 0.1-15atomic% Mn or further 0.1-10 atomic% of Hf and/or Ta. This thin film can suitably be used for reflecting film for optical recording medium, and a recording medium excellent in recording sensitivity and durability and capable of maintaining high sensitiviey and high precision for a long period can stably be constituted with superior economic efficiency.