Production manner of the moisture sensor, consists of the moisture sensor and the said moisture sensor the rainy sensor

摘要

PROBLEM TO BE SOLVED: To manufacture a sensor for metal nitride which is formed into a predetermined layer thickness with a photomask technic, has a high adhesivenss vis-a-vis the substrate and a high abrasion resistance to friction wear and is chemically stable against the influence of environment. ;SOLUTION: A dielectric 2 is coated with a photosensitive material and a negative image of a sensor region 4 is formed with a photomask technic. Then, the exposed dielectric 2 is purified by an ion shot such as a high-frequency sputtering etching. Then, conductive sensor elements 8a and 8b with layer thickness of 20-500nm are formed by precipitation from a chrome-nitrogen compound. On the other head, the exposed photoresist layer is removed. When a region 4 including the two conductive elements 8a and 8b which are placed adjacently and isolated from each other is wetted with water droplets for example, the electric resistance between the elements 8a and 8b is varied. Recording may be performed by means of a sensor electronic ciruit and also, required controls may be performed by taking out such impedance variation through leads 6a and 6b.;COPYRIGHT: (C)1996,JPO