Semiconductor equipment null for flat die light valve Drive

摘要

PURPOSE: To prevent generation of a back channel, by arranging a plurality of switching elements in an array type, and making the channel region of each switching element a single crystal semiconductor thin film having such a uniformity that the variation of crystal orientation is in the range of a specific value. ;CONSTITUTION: Electrodes for driving light valves, i.e., picture element electrodes 3 are arranged on a retaining substrate 1. A switching element 4 for selectively exciting the picture element electrodes is formed. The channel region 7 of the switching element consists of a single crystal semiconductor thin film having such a uniformity that the variation of crystal orientation is 0.0±1.0° or less. Apart from a main gate electrode, a light shielding layer 11 is formed. The light shielding layer 11 is constituted of a light shielding thin film, and arranged on the side opposite to the main gate electrode, with respect to a channel region 7. That is, the channel region is pinched by the main gate electrode and the light shielding layer 11 from above and below.;COPYRIGHT: (C)1997,JPO