Energy variable type RFQ accelerator and ion implantation equipment

摘要

PROBLEM TO BE SOLVED: To provide an energy variable type RFQ accelerator which can be continuously and stably driven for a long duration and a MeV-class ion implanting apparatus for mass production for which the accelerator is employed. ;SOLUTION: A resonance circuit with a prescribed high frequency attributed to electrostatic capacity having the RFQ electrode itself and inductance of a one-turn coil, which is constituted of electrode fixing frames 3, 4, a conductive fixing frame supporting member 6, a part of the inner wall of a vacuum container 1, and a movable short circuiting plates 7a, 7b is composed in order to generate accelerating voltage in quadruple electrodes 2a-2d and an energy variable RFQ accelerator is thus constituted. The resonance frequency is change by moving the movable short circuiting plates 7a, 7b right and left. Since a part of the inner wall of the vacuum container 1 is used as a part of the circuit and the one-turn coil is separated into upper and lower two parts, electric power loss due to an insulator and deterioration of the vacuum are suppressed and an ion implanting apparatus has high electric current and high energy and can be stably and continuously driven in an optical wide energy range from several hundreds keV and several MeV can be obtained.;COPYRIGHT: (C)1998,JPO