Image formation die soft x-ray microscope device

摘要

PURPOSE:To observe a living body with high resolution by converging X rays on the sample through a single concave aspherical multi-layered mirror condenser and enlarging a sample image on a two-dimensional X-ray image pickup element by using a phase zone plate. CONSTITUTION:A plasma X-ray source consisting of a pulse laser 1 is used as a pulse X-ray source and laser light is converged on a target 5 to generate X rays from an extremely small area; and the target 5 is arranged at the 1st focus of a rotary elliptic multi-layered film reflecting mirror and the sample 13 is arranged at its 2nd focus. The multi-layered film mirror makes the X rays monochromatic and one X-ray pulse excited and emitted by the pulse laser 1 is used for photon counting image pickup operation. The intensity of the X rays of the pulse X-ray source is adjusted so that 25=nmaxlambda/DELTAlambda, where lambdais the wavelength of the X rays, DELTAlambda is the spectrum width, and nmax is the maximum number of detected photons incident on each picture element of the two-dimensional image pickup element 16. Thus, the photon counting image pickup operation is performed with one pulse.