INTEGRATED-TYPE SQUID MAGNETOMETER AND SYSTEM FOR BIOMAGNETIC MEASUREMENTS USING THE SAME

摘要

A pickup coil and a planar type SQUID areformed integrally on a single substrate to form aSQUID magnetometer. The SQUID is disposed on the surfaceof a projecting portion of the substrate and an insulatinglayer for spacing is laminated on the SQUID. The top,bottom and side surfaces of the assembly of the SQUIDand insulating layer covering the same are all coveredwith a superconducting layer to form a magnetic shieldfor enclosing the SQUID. The magnetic shield is remotefrom the planar type pickup coil disposed on theremaining portion of the substrate by a distance whichis equal to or greater than a length of one side of thesize of the magnetic shield, thereby preventing magneticflux distortion due to the presence of the magneticshield from distrubing coil balance of the pickup coil.