METHOD OF FORMING DIAMOND-LIKE CARBON COATING IN VACUUM

摘要

A method of forming a diamond-like carbon coating in vacuum, comprising the steps of: pretreatment of the surface of the part; placing the part into a vacuum chamber; treating the surface of the part with accelerated ions; applying a sublayer of a material onto the treated surface of the part; electric arc vacuum sputtering a graphite cathode form a cathode spot and producing a carbon plasma; accelerating an ion component of the carbon plasma; depositing the produced carbon plasma on the surface of the part and producing the diamond-like carbon coating. A pulsed electric arc discharge is used, by which a plurality of cathode spots are excited at the end surface of the graphite cathode, said cathode spots moving along the end surface of the cathode at a speed of from 10 to 30 m/s and generating a carbon plasma having an ion energy of 40 to 100 eV and an ion concentration in the plasma of 10?12 to 1014 cm-3¿, with electrically insulating the part in the vacuum chamber. The temperature of the part is maintained in the range of 200 to 450 K by controlling the repetition frequency of discharge pulses.