METHOD OF FORMING DIAMOND-LIKE CARBON COATING IN VACUUM

摘要

FIELD: surface coating. SUBSTANCE: process includes placement of article into vacuum chamber, treatment of surface of accelerated ions, deposition of sublayer on surface, electric arc sputtering of graphite cathode and initiation of carbon plasma, acceleration of ion component of carbon plasma and its deposition of article surface. In this case pulse electric arc discharge is used that excites aggregate of cathode spots on end face surface of cathode which travel over its surface with rate of 10-30 m/s and generating carbon plasma with ion energy of 40-100 eV and concentration of ions in plasma 10¹²-10¹⁴cm^-3. Article is electrically insulated in vacuum chamber and its temperature is kept within limits 200-450 K by means of adjustment of repetition frequency of discharge pulses. EFFECT: enhanced productivity and quality of coating, its improved homogeneity and wear resistance. 10 cl, 3 dwg