Scanning near-field optic/atomic-force microscope, probe for use in same, and method of fabricating said probe

摘要

A combined scanning near field optical and atomic force microscope (NSOM/AFM) capable of measuring the topography and the optical characteristics of the surface of a sample (37) at high resolution irrespective of the transmittance and the conductivity of the sample is described. The apparatus, in one embodiment, comprises a probe (4), a light source for illuminating a sample with light (34), a photoelectric converter device (38) and optics for receiving light transmitted through the sample, a laser (30) for detecting deflections of the probe, a condenser lens (31) for directing the laser light on to the rear surface of the probe, a detection system for detecting reflected light (32,33), a rough-motion mechanism (39) and a fine-motion mechanism (40) for moving the sample and the probe relative to each other, a control means for controlling the distance between the sample and the probe, and a computer (42) for controlling the whole apparatus. The probe, comprising a cladded single mode optical fibre, has a front end portion and a light-propagating body continuous with the front end portion. The front end portion and the light-propagating body are shaped like a hook. A method for manufacturing the probe is described.