Method of producing a microporous, gas permeable electrode structure and a microporous, gas permeable electrode structure

摘要

Disclosed is a method of producing a microporous, gas permeable electrode structure e.g. for a humidity sensor. According to the method, a first slightly oxidizing microporous electrode layer e.g. Cr,Ti,Ni) (4) is formed, by means of a vacuum evaporation, on a substrate (2), using an angle (x) between the substrate (2) and evaporation source (1) smaller than 90°. On the first microporous layer (4) is then formed another microporous layer (5) of nonoxidizing material e.g. Aq,An,Pt,Pd using essentially the same deposition angle (x) as in the first fabrication step.