Method and apparatus for manufacturing high-purity chemical for microelectronic device industry

摘要

The present invention relates to a method for producing a high purity liquid chemical that can be used in the microelectronic industry, which method comprises gradually introducing impurities into an aqueous solution of an initially deionized (deionized) high purity, And passing through the column to continuously purify the chemical gas and the gas leaves the second purification column at a high purity with a particularly low content of metal elements and the purified gas is then collected at the bottom of the column and purified Dissolving in a packed column in which the liquid enriched with the chemical gas is continuously recycled, and then distributing the high purity chemical when the concentration of the dissolved gas is reached.