Method of fabrication of a microstructure having an inside cavity

摘要

The present invention relates to a method of fabricating a microstructure having an inside cavity comprising the steps of:depositing a first layer or a first stack of layers in a substantially closed geometric configuration on a first substrate;performing an indent on the first layer or on the top layer of said first stack of layers;depositing a second layer or a second stack of layers substantially with said substantially closed geometric configuration on a second substrate;aligning and bonding said first substrate on said second substrate such that a microstructure having a cavity is formed according to said closed geometry configuration.