Coating and developing apparatus, composite apparatus, and processing method in coating and developing apparatus

摘要

The coating and shaping apparatus comprises a processing unit group having a plurality of processing units including a first mounting table for mounting a substrate and a complex unit for forming a second mounting table for mounting and cooling the substrate. A plurality of processing units individually perform the processing required for application and development of the substrate. The plurality of processing units are made up of multiple layers. First, a substrate is transported from a substrate storage member storing a plurality of substrates to a first mount. Next, the substrate is taken out from the first mounting position and coated and developed. Thereafter, the coated and developed substrate is transported to the second mount and transported to the substrate storage member from the second mount.