Manufacturing method of diamond-like carbon emitter tip for field emission display device

摘要

The present invention relates to a diamond-like carbon emitter tip for a field emission display device capable of forming a tip by using diamond-like carbon (DLC) only on an upper side end of an emitter tip emitting electrons, A step of forming a cathode electrode 32 and an insulator layer 30 on a glass substrate 34 and a step of forming a gate electrode 28 on the upper side of the insulator layer 30, Etching the insulator layer 30 after forming the hole pattern 21 in the layer 30; forming an Al sacrifice layer 26 on the upper side of the gate electrode 28; A step of forming a metal tip 22 by depositing a metal film 22 on the upper side of the sacrifice layer 26 so as not to completely cover the gate hole and a step of forming a DLC layer 20 on the upper side of the metal tip 22 And then, lift-off the Al sacrificial layer 26. In this case,