children. blood. A (IPA) steam dryer

摘要

There is disclosed an IPA steam drying apparatus capable of suppressing the generation of particles in an IPA (IsoPropyl alcohol) steam drying process in which a wafer is cleaned in a manufacturing process of a semiconductor device and then proceeds to a subsequent process. The present invention minimizes the collision while the IPA vapor is exhausted by configuring the main exhaust only at the upper end of the main body of the IPA steam dryer so that the exhaust of the IPA steam occurs only vertically upward.