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Equipment unit status management method of semiconductor manufacturing equipment management system
Equipment unit status management method of semiconductor manufacturing equipment management system
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机译:半导体制造设备管理系统的设备单位状态管理方法
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摘要
The present invention relates to a facility unit state management method of a semiconductor manufacturing facility management system. In the present invention, a predetermined unit state management module is provided in a host. By quickly isolating at, first, it is possible to prevent process accidents caused by anomaly unit, and secondly, to significantly improve the overall production efficiency of the product.
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