Periodic management method of facility precautionary maintenance of semiconductor manufacturing facility management system

摘要

The present invention relates to a method for managing cycles of facility precaution prevention in a semiconductor manufacturing facility management system. In the present invention, a predetermined PM management module is provided between a host and facilities, and various operating parameter values uploaded from the facilities are provided. By making this automatic check continuously, firstly, the PM cycles of the facilities can be managed consistently without operator intervention, and secondly, unforeseen damage of the equipment due to the error of the PM cycle determination of the workers can be prevented. As a result, the overall work efficiency of workers can be significantly improved.