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ION SENSOR USING PH-ISFET

机译:使用PH-ISFET的离子传感器

摘要

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ion sensor and a method of manufacturing the same, wherein a silicon substrate 1, a source 2, a drain 3, a silicon oxide film 4, a silicon nitride film 5, an aluminum metal electrode 6, and an ion sensing device In the field effect transistor type ion sensor composed of the membrane (7), the ion sensing membrane (7) is formed on the lipophilic polymer film (11) to form a hydrophilic polymer sensing membrane (12) containing a sensing material to have a double membrane structure The low sensitivity and sensitivity to hydrogen ions present in the aqueous solution as well as the ions to be measured in the aqueous solution prevented the formation of an insulating waterproof film with a lipophilic polymer on the base of the field effect transistor pH sensor (pH-ISFET). Phosphorus polymer is used as an external sensing film to increase the diffusion speed of the solution to be measured in aqueous solution to shorten the response time and improve the sensitivity. Requester is an ion sensor, and a manufacturing method using the pH sensor.
机译:离子传感器及其制造方法技术领域本发明涉及一种离子传感器及其制造方法,其中硅衬底1,源极2,漏极3,氧化硅膜4,氮化硅膜参照图5,铝金属电极6和离子感测装置在由膜(7)构成的场效应晶体管型离子传感器中,在亲脂性聚合物膜(11)上形成离子感测膜(7)以形成亲水性。包含具有双膜结构的传感材料的聚合物传感膜(12)对水溶液中存在的氢离子以及水溶液中要测量的离子的低灵敏度和敏感性阻止了绝缘防水膜的形成基于场效应晶体管pH传感器(pH-ISFET)的亲脂性聚合物。磷聚合物用作外部传感膜,可提高待测溶液在水溶液中的扩散速度,从而缩短响应时间并提高灵敏度。请求者是离子传感器,是使用pH传感器的制造方法。

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