ION CHROMATOGRAPHY SYSTEM FOR ENVIRONMENTAL ANALYSIS OF SEMICONDUCTOR EQUIPMENT

摘要

An ion chromatography system for environmental analysis of semiconductor equipment according to the present invention comprises an atmospheric impingement type impinger device and ion chromatography, and the impinger device is an absorbent liquid container, an intake pipe and an exhaust pipe connecting the outside to the container. And an atmospheric pressure pump, wherein the ion chromatography has a guard column, a separation column, and a detector, wherein the intake port of the intake pipe is at a measurement target position, and the impinger device and the ion chromatography The chromatography is characterized in that the absorbent liquid of the absorbent liquid container is directly connected to the sample inlet of the ion chromatography.;Therefore, according to the ion chromatography system for environmental analysis of semiconductor equipment of the present invention, first, there is an advantage that the components of the atmosphere at the position to be measured can be analyzed immediately and the phenomenon can be dealt with promptly.