IC TESTER AND METHOD OF LOCATING DEFECTIVE PORTIONS OF IC

摘要

PURPOSE: To provide a method for specifying the defective part of an IC while enhancing the operability and the image quality. ;CONSTITUTION: A test pattern generator 200 is provided with means which can set a plurality of patterns for stopping the pattern update operation. Every time when at stop pattern is generated, pattern update operation of the test pattern generator 200 is stopped and a stop signal is delivered to a charged particle ray system 300 in order to acquire an image data. Upon acquisition of image data, an acquisition completion signal generating means 308 transmits an acquisition completion signal and the test pattern generator 200 resumes the pattern update operation. Consequently, different test patterns can be fed alternately to an element to be tested and the image quality can be enhanced by adding or subtracting the image data. Defective part on an IC is specified by differentiating the potential contrast image every time when the logic is different between passed and failed products.;COPYRIGHT: (C)1995,JPO