SPINDLE UNIT USING HIGH STIFFNESS CYLINDERICAL HYDROSTATIC AIR BEARING

摘要

The present invention relates to a spindle of a machine tool, comprising a drive motor (5) on one side of the housing (8), a chuck (4) on its tee, and a spindle (1) installed inside the housing (8). In the ultra-precision processing machine for driving the engine, air static radial bearings (2A, 2B) for rotationally supporting the outer circumferential surface of the spindle (1) are installed in the housing (8), and one end of the spindle (1) has a flange ( 11) and at the same time the flange 11 is configured to be thrust supported by air static thrust bearings 3A, 3B installed in the housing 8, so that the spindle 1 is forward when the spindle 1 is inflated by thermal deformation or the like. Expansion can be prevented, the processing precision of the workpiece can be increased, and the spindle 1 can be prevented from being pushed backward by the cutting force, thereby obtaining high rigidity.