Apparatus and method for observation of growing semiconductor crystals with a volatile component

摘要

The observation apparatus forms part of a growing vessel (3) which accommodates a crucible, is located in a pressure vessel, and is provided with an annular observation window (2). An observation tube (28) is directed onto the observation window. A coaxial annular blind (10) with a segmental cutout (11) in front of the window (2) is provided with means for its step-wise rotation. These means include a ratchet ring (21) which has a profile correlating with the angle of the segment (11), and is rigidly attached to the wall of the vessel (3). At each new position of the of the blind, the observation tube is aligned with the segmental cutout and a CCD camera is used to record the image and to deliver the data for processing to an associated computer unit.