HIGH PURITY COMPOSITE CZOCHRALSKI PROCESS FURNACE COMPONENT AND SEMICONDUCTOR CRYSTAL GROWING APPARATUS COMPRISING THE HIGH PURITY COMPOSITE AND CZOCRALSKI CRYSTAL GROWING PROCESS USING THE SEMICONDUCTOR CRYSTAL GROWING APPARATUS

摘要

The Czochralski process furnace component comprises a high purity, semiconductor standard composite comprising carbon fibers reinforced with carbon matrix with a degree of metal impurity below the detection limit of an inductively coupled plasma spectrometer. The process of producing the component includes heat treatment of the carbon fiber and the component.