method and device for precision gauging surfaces

摘要

In order to measure chiefly the roughness of surfaces, the invention proceeds from the triangulation method by means of a laser, in which the angle between the surface and the measurement beam can be adjusted. The light spot produced on the surface must be smaller the more accurate the resolution is to be. In practice, in these regions interference phenomena occur which, acting as speckle, disturb the measurement signal through noise, The invention substantially improves the extent to which the received signals can be evaluated by virtue of the fact that the light bundle reflected/scattered by the surface is resolved optically, as a function of the angle, into two component bundles having approximately the same area distribution of intensity transverse to the principle beam direction, and that the two light bundles are then detected by photodiode and the roughness characteristics are determined from the signals. IMAGE