microelectronic feldemissionsvorrichtung with breakthrough of isolated gateelektrode and method for realization

摘要

A field emission device (100) including an electron emitter (106) and a peripherally disposed gate extraction electrode (103) defining a free space region (105) therebetween. The device (100) has an insulating layer (104) substantially isolating the gate extraction electrode (103) from the free space region (105). The device prevents damaging arc discharge between the electron emitter (106) and gate extraction electrode (103) because of the improved insulation and provides an additional mechanism for electric field enhancement. IMAGE