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Diamond film growth argon-carbon plasmas
Diamond film growth argon-carbon plasmas
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机译:金刚石膜生长氩碳等离子体
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摘要
A method and system for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate.
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