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Effluent-gas-scavenger system for process tube, minimizing back diffusion and atmospheric contamination
Effluent-gas-scavenger system for process tube, minimizing back diffusion and atmospheric contamination
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机译:用于处理管的废气清除系统,可最大程度地减少向后扩散和大气污染
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摘要
A dual-function scavenger system, especially useful in conjunction with ovens for processing semiconductor materials, wherein the spent process gases from the ovens are separated from their residual thermal energy for disposition through discrete channels. Back diffusion of atmospheric air into the ovens is minimized.
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