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Method of removing inorganic contamination by chemical alteration and extraction in a supercritical fluid media
Method of removing inorganic contamination by chemical alteration and extraction in a supercritical fluid media
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机译:在超临界流体介质中通过化学变化和萃取去除无机污染物的方法
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摘要
A method of removing inorganic contamination (contamination 104 of FIGS. 2a-2b) from a layer (layer 102) overlying a substrate (substrate 100), the method comprising the steps of: removing the layer overlying the substrate with at least one removal agent; reacting the inorganic contamination with at least one conversion agent, thereby converting the inorganic contamination; removing the converted inorganic contamination by subjecting it to at least one solvent agent, the solvent agent included in a first supercritical fluid; and wherein the converted inorganic contamination is more highly soluble in the solvent agent than the inorganic contamination.
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