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Method of exposing, with correction of pattern data used to draw photomask to overcome proximity effects

机译:曝光方法,通过校正用于绘制光掩模的图形数据来克服邻近效应

摘要

A correcting method and a correcting apparatus which consider a proximity effect when drawing a pattern of a photomask by an energy beam such as an electron beam or a light proximity effect when performing exposure by using a photomask and obtaining a transfer pattern and can correct the pattern data so that the finally obtained transfer pattern becomes close to the designed pattern even if they occur. Where there is another pattern at the periphery of a pattern in a certain mesh at a center which is subjected to mesh registration, it is decided that a mutual proximity effect will occur at the time of drawing, only a part of the patterns in which it can be considered that the mutual proximity effect will occur are subdivided, and the dosage amount data at drawing are assigned to individual subdivided patterns. Where there is not another pattern at the periphery, it is decided that the self proximity effect will occur at the time of drawing, the peripheral portions of the pattern in which it can be considered that the self proximity effect will occur are subdivided, and the dosage amount data at drawing are assigned to individual subdivided patterns.
机译:校正方法和校正设备,当通过使用诸如电子束的能量束绘制光掩模的图案时考虑邻近效应,或者当通过使用光掩模进行曝光并获得转印图案时考虑光邻近效应,并且可以对该图案进行校正数据,以使最终获得的转印图案即使发生也变得接近设计图案。如果在中心的某个网格中的某个图案的外围存在另一个要进行网格配准的图案,则确定在绘制时会出现相互接近的效果,只有其中一部分图案会出现可以认为将发生相互邻近效应,并将绘制时的剂量数据分配给各个细分图案。在外围没有其他图案的情况下,确定在绘制时将发生自接近效应,将可认为会发生自接近效应的图案的外围部分进行细分,并且将图纸上的剂量数据分配给各个细分模式。

著录项

  • 公开/公告号US5885748A

    专利类型

  • 公开/公告日1999-03-23

    原文格式PDF

  • 申请/专利权人 SONY CORPORATION;

    申请/专利号US19980093912

  • 发明设计人 HIDETOSHI OHNUMA;

    申请日1998-06-09

  • 分类号G03C5/00;

  • 国家 US

  • 入库时间 2022-08-22 02:08:25

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