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Laser beam machining apparatus, focus positioning device for laser beam machining apparatus, and converged laser beam diameter measuring device

机译:激光加工装置,用于激光加工装置的焦点定位装置以及会聚激光直径测量装置

摘要

The laser machining apparatus according to the present invention holds a plate-formed work W giving tension thereto, and comprises a driver base/a work base driving the work in the axial direction, a converging lens for a laser beam L, a laser machining head moving in a direction in which the laser beam L is focused onto the work, an upper work holding member having a nozzle for laser beam irradiation integrated thereto, a bellows for relatively and displaceably connecting the laser machining head and the upper work holding member in the focusing direction, and a lower fixed base/a highly slippery plate located and fixed at a position corresponding to a center of the nozzle, and the work is held between the upper work holding member and the lower fixed base/a highly slippery plate at a position adjacent to the laser beam machining position.
机译:根据本发明的激光加工设备保持板状工件W,该板状工件W对其施加张力,并且包括驱动器基座/在轴向方向上驱动工件的工件基座,用于激光束的会聚透镜L,激光加工头。在使激光束L聚焦在工件上的方向上移动的上部工件保持构件具有集成到其上的用于激光束照射的喷嘴,用于在激光加工头中相对且可移位地连接激光加工头和上部工件保持构件的波纹管。聚焦方向,并且下部固定基座/高度光滑板位于并固定在与喷嘴的中心相对应的位置,并且工件被保持在上部工件保持构件和下部固定基座/高度光滑板之间。与激光束加工位置相邻的位置。

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