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Use of carbon-based films in extending the lifetime of substrate processing system components
Use of carbon-based films in extending the lifetime of substrate processing system components
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机译:使用碳基薄膜来延长基板处理系统组件的使用寿命
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摘要
An apparatus for processing substrates that includes a processing chamber having an interior surface at least partially coated with a carbon-based coating. The carbon-based coating protects the interior of the chamber from etching gases and other reactants used during substrate processing. The coating also resists accumulation of residues, does not generate particulates and seals in impurities residing in the coated materials. In preferred embodiments the carbon-based coating is either diamond or a diamond-like carbon (DLC) coating. Also described is a process for protecting a processing chamber's interior surface from the reactants used in substrate processing by coating at least portions of the surface with such a carbon-based coating.
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