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Sensitive method of evaluating process induced damage in MOSFETs using a differential amplifier operational principle
Sensitive method of evaluating process induced damage in MOSFETs using a differential amplifier operational principle
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机译:使用差分放大器工作原理评估MOSFET中过程引起的损坏的灵敏方法
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摘要
Techniques for measuring process induced damage, such as damage experienced during plasma etching or ion implementation, utilize a differential amplifier having multi-layer antennas (capacitors) of different sizes formed on respective inputs. Measurement of &Dgr;Ids (the difference between Ids.sub.1 and Ids.sub.2 off a MOSFET of the differential pair) or &Dgr;Idlin provides a sensitive and accurate measure of process induced damage. The techniques can be applied to monitor process induced damage while the manufacturing process is ongoing or as a measure of quality of the finished product.
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