Size and registration adjustment manner null of the rectangular beam in the charged particle beam drawing

摘要

PURPOSE: To provide a method of facilitating accurate adjustment of the size and positioning deflector of a rectangular beam. ;CONSTITUTION: An opening 37 of a knife edge 32 is irradiated with a rectangular beam. An electron beam is made scan twice in the direction of an arrow X, and detection signals of a Faraday cup 33 obtained through each scanning are differentiated by a differentiating circuit 34, which are stored in a memory 36 through a computer 21. As the scanning starting points of a first and a second scanning carried out by an electron beam are made to deviate from each other by a size of a rectangular beam, a joint between two signals becomes flat when an actual rectangular beam is formed as large in size as prescribed. But, when a rectangular beam is not set in size as prescribed, a joint between two signals grows recessed or protrudent. A device is controlled so as to make a rectangular beam as large in size as prescribed based on a joint of two overlapped signals.;COPYRIGHT: (C)1995,JPO