Installation manner null of thermocouple introduction tube to decompression central processing unit and decompression treatment

摘要

PURPOSE:To surely prevent that a member, to be introduced, which has been introduced into a process tube is pulled into the inner part from a support position by a differential pressure even when a pressure inside the process tube is lowered by a method wherein a stopper which prevents the member to be introduced from being pulled into a treatment container when the pressure is lowered is installed at the member to be introduced. CONSTITUTION:At a low-pressure treatment apparatus, a treatment container is provided with a member 50, to be introduced, which is supported airtightly and introduced into the treatment container and a treatment is executed while the inside of the treatment container is lowered. At the apparatus, said member 50 to be introduced is provided with a stopper 110 which prevents the member 50 to be introduced from being pulled into the treatment container when a pressure is lowered. For example, a thermocouple introduction tube (T/C tube) introduction port 50 is composed of the following: an introduction guide member 60 on which a radiating fin is installed; an O-ring 70 for airtight sealing use; a cylindrical body member 80; a first cap member 90; and a second cap member 100. A T/C tube 40 is inserted into the T/C tube introduction port 50; a ring-shaped groove 40 is formed at the outer circumferential wall part at the outside end part of a horizontal shaft part 44 at the T/C tube 40; a stopper 110 whose cross-sectional shape is nearly C-shaped is fitted to the ring-shaped groove 46.