Method of manufacturing surface conduction electron-emitting device, method of manufacturing electron-emitting devices

摘要

PURPOSE:To prevent local heat generation or the like for a substrate, simplify manufacturing processes, and achieve a large surface by laminating an electron emission material pattern on a solid electrode thin film, and oxidizing the electrode thin film to be insulated partly. CONSTITUTION:A film of an electrode material is formed in vacuum to be solid in an element effective part on a substrate 1 to have an interval 4 between electrodes, and an electron emission material 5 is patterned on the electrode thin film crossing the part 4 to be electrodes 2, 3. An obtained element is then heated in an oxygen atmosphere to oxidize the electrode thin film where the material 5 is not coated so as to set an electric resistance limitless or at the highest, and thus a multiple electrode pattern of the electrode thin film having the interval between the electrodes is formed. An electron emission element having an electrode pattern can thus be obtained by a difference between the oxidized film and the metal film in the electrode solid film. A local heat generation at the part 4 can be diffused in the whole surface of the part 4, so a local heat generation can be prevented, manufacture processes can be simplified, and a large-surface and a high-density disposition in the element can be achieved.