PROJECTION ALIGNER, SUBSTRATE HISTORY-RETAINING APPARATUS, AND STORAGE MEDIUM WITH SUBSTRATE HISTORY RETENTION PROGRAM STORED THEREIN

摘要

PROBLEM TO BE SOLVED: To provide a projection aligner, a substrate history-retaining apparatus, and a storage medium for storing a substrate history retention program for reducing load of a host computer and preventing a substrate treatment history from being lost, even if the host computer or a network fails. ;SOLUTION: A projection aligner 1, that is connected to a host computer 2 and treats a substrate, is provided with a storage means 4 for storing the treatment history of a substrate being treated by the projection aligner 1 and a reporting means 5 for reporting the treatment history to the host computer 2, in response to the request of the host computer 2.;COPYRIGHT: (C)2000,JPO