X-ray spectroscopic analysis manner null of the sample which is covered with

摘要

PURPOSE:To obtain the result of measurement wherefrom the effect of a thin film is removed, in an X-ray spectrochemical analysis of a sample covered with the thin film. CONSTITUTION:Measured intensities of characteristic X-rays of constituent elements radiated from a measured sample coated with a thin film and excited by an electron beam are subjected to correction for absorption by the surface thin film and the intensity ratio between the characteristic X-rays to be obtained when no surface film exists is determined, the concentration of each element being assumed. The X-ray intensity ratio between the respective characteristic X-rays of the constituents of the measuring sample is determined by theoretical computation, the assumed concentration at the time when these ratios accord with each other is taken as a measured concentration and the composition of the measured sample is determined by successive approximation.