MANUFACTURE OF METALLIC SUPERFINE PARTICLE, AND METALLIC SUPERFINE PARTICLE AGGREGATE TO WHICH THE MANUFACTURE IS APPLIED

摘要

PROBLEM TO BE SOLVED: To manufacture superfine metallic particles of e.g. ≤10 nm in grain size with excellent reproducibility and with grain size made even. ;SOLUTION: Raw particles 2 formed of a metal oxide which is low in generated free energy such as aluminum oxide are arranged on an amorphous carbon support film 1. The whole raw particles 2 are irradiated for a short time with the electron beam 3 with the intensity of ≥1023 e/cm2.sec in the highly vacuum atmosphere. A large number of superfine metallic particles 4 of ≤10 nm in grain size and with grain size made even can be generated through the short- time irradiation of the electron beam 3 of such intensity.;COPYRIGHT: (C)2000,JPO