PRODUCTION OF AGGREGATE OF SUPERFINE METAL PARTICLES AND AGGREGATE OF SUPERFINE METAL PARTICLES APPLYING THE SAME

摘要

PROBLEM TO BE SOLVED: To obtain an aggregate of mixed different superfine metal particles with good reproducibility. ;SOLUTION: First metal oxide particles 2 containing a 1st metallic element and 2nd metal oxide particles 3 containing a 2nd metallic element different from the 1st metallic element are arranged on an amorphous carbon supporting film 1. This supporting film 1 with the metal oxide particles 2, 3 is irradiated with 1st electron beams 4 under conditions which can release 1st metallic atoms from the 1st metal oxide particles 2 to form 1st superfine metal particles 5. The supporting film 1 with the metal oxide particles 2, 3 is then irradiated with 2nd electron beams 6 under conditions which can release 2nd metallic atoms from the 2nd metal oxide particles 3 to form 2nd superfine metal particles 7.;COPYRIGHT: (C)2000,JPO