Super high order accuracy three coordinate measuring machine

摘要

PURPOSE:To make it possible to apply an ultrahigh-precision apparatus for three- dimensional measurement to a large-sized object to be measured as well. CONSTITUTION:A frame 3 moving horizontally in the direction of the X axis or the directions of the X-Y axes is provided on a base 1. On this frame 3, a Z-axis moving stage 5 moving up and down in the direction of the Z axis being vertical to the direction of the X axis and the directions of the X-Y axes is provided and further a measuring means 61 of measuring a distance Z1 between the surface to be measured of an object 7 to be measured which is fixed on the base 1 and a specified point on the Z-axis moving stage 5 positioned above the surface to be measured of the object is provided. A supporting body 8 fixed on the base 1 is provided with an X-Y axes reference plane 9 being vertical to the Z axis and positioned above the Z-axis moving stage 5, and with a measuring means 62 of measuring the distance Z2 between the X-Y axes reference surface 9 and the specified point on the Z-axis moving stage 5 positioned below the reference surface. The shape of the object to be measured is measured on the basis of the data on the distance Z1 and the distance Z2 to each measuring point in the directions of the X-Y axes of the object 7 to be measured.