DEVICE AND METHOD FOR INSPECTING INNER PERIPHERAL SURFACE OF CLOSED-END CYLINDRICAL MEMBER FOR SHAPE, METHOD FOR WORKING CLOSED-END CYLINDRICAL MEMBER, AND MANUFACTURE OF BATTERY

摘要

PROBLEM TO BE SOLVED: To simultaneously measure the distortion of the inside diameter and the bend in the cylindrical direction of a bottomed cylindrical member by relatively moving an optical system and a supporting means straight in the axial direction of the cylindrical member and checking the interference between the three-dimensional shape data of the inner peripheral surface of the cylindrical member calculated from the picture signal of annular slit light and virtual cylinder data. ;SOLUTION: While a closed-end ceramic pipe 1 held by a holder 20 is rotated at a low speed, a microcomputer 32 sets the measuring range of the pipe 1 based on the height L of the bottom section of the pipe 1 found by means of a height detector 10. Then the inside diameter of the pipe 1 is measured by linearly continuously moving an optical system 8 in the Z-direction along the axis of the pipe 1 by controlling the drive of a motor 21. Thereafter, the inner peripheral surface 1b of the pipe 1 is irradiated with patterned annular slit light emitted from a lighting source 6 and transmitted through the transparent section 5a of a mask 5 and reflected light is caused to form an image as an annular image on the light receiving surface of a TV camera 7 through a conical mirror 2b, a detecting lens 3, and a half mirror 4. An image processing device 31 finds the eccentricity and the bias of the inside diameter of the pipe 1 on each cross section based on the annular image.;COPYRIGHT: (C)2000,JPO