METHOD FOR CONTROLLING CARBON PROTECTION FILM THICKNESS AND DEVICE FOR CONTROLLING CARBON PROTECTIVE FILM THICKNESS

摘要

PROBLEM TO BE SOLVED: To accurately control the thickness of a carbon protective film, with a simple method.;SOLUTION: When a Co-O magnetic film (metal magnetic film) 2 is previously formed on a PET base film 1 and a DLC protection film (carbon protective film) 3 is formed on the Co-O magnetic film 2, the difference in reflection factor between the Co-O magnetic film 2 and DLC protection film is measured to control the film thickness of the DLC protection film 3 to a specific thickness.;COPYRIGHT: (C)2000,JPO